Theoretical hardness of Zr 3N 4 films

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0256-307X/28/7/076102
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  1. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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LanguageEnglish
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NPARC number21271539
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Record identifiera0f4db83-561e-4d28-911e-441fb257e21a
Record created2014-03-24
Record modified2020-04-21
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