Calculations of thermal and electrical distributions in silicon microstructures

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Author	Search for: Beale, S. B.; Search for: Djebbar, R.¹; Search for: Post, M.
Affiliation	National Research Council of Canada. NRC Institute for Research in Construction
Format	Text, Article
Subject	CFD modeling, gas sensor, heat transfer, microstructure, ohmic heating
Abstract	This paper describes a research programme directed towards modelling the thennomechanical behaviour of silicon microstructures. A three-dimensional numerical scheme was used to compute heat transfer and distribution of electric potential in the layers of two microhotplate designs. Detailed information was obtained on the local temperature distribution in the designs, and surrounding substrate. Variable properties of the different layers in the microstructures were accounted for. Calculations indicated that overall heat transfer coefficients obtained from these studies agreed with values derived from experimentally obtained emission data, to within 6%.
Publication date	2001-06-01
In	PHOENICS Journal : Computational Fluid Dynamics & its Applications 14, no. June 1 (1 June 2001): 1–11.
Language	English
Peer reviewed	Yes
NRC number	NRCC 44766 NRC-IRC-10263
NPARC number	20378965
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Record identifier	a22e62a6-3afa-4f36-b650-2a0fa0ddad37
Record created	2012-07-24
Record modified	2020-03-27