| DOI | Resolve DOI: https://doi.org/10.1117/12.3002214 |
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| Author | Search for: Korcek, Radovan; Search for: Fraser, William1; Search for: Wilmart, Quentin; Search for: Medina Quiroz, David; Search for: Litvik, Jan; Search for: Zubor, Lukas; Search for: Krehel, Tomas; Search for: Edmond, Samson; Search for: Milanizadeh, Maziyar1ORCID identifier: https://orcid.org/0000-0001-6568-7219; Search for: Schmid, Jens H.1ORCID identifier: https://orcid.org/0000-0003-3508-7428; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Ye, Winnie N.ORCID identifier: https://orcid.org/0000-0003-2817-4531; Search for: Vivien, Laurent; Search for: Alonso-Ramos, Carlos; Search for: Benedikovic, Daniel |
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| Editor | Search for: García-Blanco, Sonia M.; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130 |
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| Affiliation | - National Research Council of Canada. Quantum and Nanotechnologies
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| Format | Text, Article |
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| Conference | Integrated Optics: Devices, Materials, and Technologies XXVIII, January 27 - February 1, 2024, San Francisco, CA, USA |
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| Subject | integrated photonics; silicon nitride; surface grating couplers; hybrid waveguide platform; metamaterials; metamaterials; metamaterials; metamaterials |
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| Abstract | Silicon nitride (Sᵢ₃N₄) is a leading platform in integrated photonics, providing unique passive functionalities, while maintaining compatibility with complementary metal-oxide-semiconductor processes and scalable and low-cost high-volume production. However, the moderate index contrast of the Sᵢ₃N₄ platform makes it difficult to implement efficient vertical surface grating couplers. In this work, we present efficient and robust fiber-chip grating couplers on native and hybrid Sᵢ₃N₄ platforms. Minimum coupling losses between -5 dB and -3 dB were measured for single-etch fabricated devices near 1.55 μm wavelength. Moreover, by leveraging the amorphous-silicon overlay on top of the Sᵢ₃N₄ platform, we develop hybrid single-etch grating couplers, with a coupling loss approaching 1 dB. The demonstrated grating couplers are promising for SiN integrated photonics, enabling a rapid and cost-effective chip interfacing with standard optical fibers. This opens up novel opportunities for rising applications, including optical communications, nonlinear optics, or quantum information sciences. |
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| Publication date | 2024-03-12 |
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| Publisher | SPIE |
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| In | |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | a382be41-074b-4b52-89a5-40fbfd5fb97c |
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| Record created | 2024-12-17 |
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| Record modified | 2024-12-17 |
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