Fabrication and atomistic modeling of ion-etch nanostructures on substrates
Fabrication and atomistic modeling of ion-etch nanostructures on substrates
DOI | Resolve DOI: https://doi.org/10.1557/PROC-849-KK6.9 |
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Author | Search for: ; Search for: |
Editor | Search for: Gilmer, George H.; Search for: Huang, Hanchen; Search for: Wang, Enge |
Format | Text, Article |
Conference | 2004 MRS Fall Meeting: Symposium KK: Kinetics-Driven Nanopatterning on Surfaces, November 29-December 3, 2004, Boston, Massachusetts, USA |
Abstract | |
Publication date | 2005 |
In | |
Series | |
Peer reviewed | Yes |
NRC publication | This is a non-NRC publication"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC. |
NRC number | 19 |
NPARC number | 12328314 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | a3ad38b8-c83d-49f8-98cf-8ba945494b44 |
Record created | 2009-09-10 |
Record modified | 2020-04-07 |
- Date modified: