Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure

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Download	View accepted manuscript: Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure (PDF, 841 KiB)
DOI	Resolve DOI: https://doi.org/10.1364/OL.35.003243
Author	Search for: Halir, R.; Search for: Cheben, P.¹ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Schmid, J. H.¹; Search for: Ma, R.¹; Search for: Bedard, D.¹; Search for: Janz, S.¹; Search for: Xu, D.-X.¹; Search for: Densmore, A.¹; Search for: Lapointe, J.¹; Search for: Molina-Fernández, Í.
Affiliation	National Research Council of Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
ISSN	0146-9592 1539-4797
Abstract	We demonstrate a fully etched, continuously apodized fiber-to-chip surface grating coupler for the first time (to our knowledge). The device is fabricated in a single-etch step and operates with TM-polarized light, achieving a coupling efficiency of 3:7 dB and a 3 dB bandwidth of 60 nm. A subwavelength microstructure is employed to generate an effective medium engineered to vary the strength of the grating and thereby maximize coupling efficiency, while mitigating backreflections at the same time. Minimum feature size is 100 nm for compatibility with deep-UV 193 nm lithography.
Publication date	2010-10-01
In	OPTICS LETTERS 35, no. 19 (1 October 2010): 3243–3245.
Language	English
Peer reviewed	Yes
NPARC number	17162595
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Record identifier	a5dad129-0899-463a-9c49-5e686f2cfe8e
Record created	2011-03-26
Record modified	2020-04-17

Date modified:: 2024-07-19