Preferred Orientation and Hardness Enhancement of TiN/CrN Superlattice Coatings Deposited by Reactive Magnetron Sputtering
Preferred Orientation and Hardness Enhancement of TiN/CrN Superlattice Coatings Deposited by Reactive Magnetron Sputtering
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Affiliation |
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Format | Text, Article |
Subject | Superlattice coatings; Sputtering; Hardness; Preferred orientation |
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NRC number | SMPL-2001-0163 |
NPARC number | 8928579 |
Export citation | Export as RIS |
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Record identifier | ac045855-ca1f-492e-bb93-ef7adad365b6 |
Record created | 2009-04-23 |
Record modified | 2020-04-16 |
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