A measurement of young’s modulus and residual stress in MEMS bridges using a surface profiler
A measurement of young’s modulus and residual stress in MEMS bridges using a surface profiler
DOI | Resolve DOI: https://doi.org/10.1088/0960-1317/13/5/321 |
---|---|
Author | Search for: 1 |
Affiliation |
|
Format | Text, Article |
Publication date | 2003 |
In | |
NPARC number | 12744629 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | acec03b3-c346-45c3-89cb-5f9d766244c8 |
Record created | 2009-10-27 |
Record modified | 2020-04-02 |
- Date modified: