| Author | Search for: Jiang, W.; Search for: Landheer, Dolf1; Search for: Lopinski, Gregory2; Search for: Rankin, A.; Search for: Tait, N.; Search for: Tarr, Garry1; Search for: Shinwari, Mohammad1; Search for: Deen, M. |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
- National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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| Format | Text, Article |
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| Conference | Thirteenth Canadian Semiconductor Technology Conference, August 14-17, 2007, Montreal, Canada |
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| NPARC number | 12346344 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | ae26f162-f853-42df-8d32-7dbca7323287 |
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| Record created | 2009-09-17 |
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| Record modified | 2020-04-16 |
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