Si-photonic waveguide grating coupler arrays for wavefront monitoring

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/PN56061.2022.9908321
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Affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
  2. National Research Council of Canada. Digital Technologies
FormatText, Article
Conference2022 Photonics North (PN), May 24-26, 2022, Niagara Falls, ON, Canada
Subjectwavefront monitoring; adaptive optics; silicon photonics; grating couplers; machine learning design; optical interferometry; semiconductor device measurement; power measurement; surface waves; optical distortion; couplers; silicon photonics
Abstract
Publication date
PublisherIEEE
In
LanguageEnglish
Peer reviewedYes
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Record identifierb200a683-a6f5-4e50-8352-74886d85785b
Record created2023-01-24
Record modified2023-01-26
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