Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer

DOI	Resolve DOI: https://doi.org/10.1117/12.246817
Author	Search for: Tikhonravov, Alexander; Search for: Trubetskov, Michael; Search for: Tikhonov, Andrew; Search for: Tcherednichenko, Oleg; Search for: Lysoi, Boris; Search for: Mikhailova, Ksenia; Search for: Sullivan, Brian; Search for: Dobrowolski, Jerzy; Search for: Reid, Ian
Format	Text, Article
Abstract	A novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO2 films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.
Publisher	SPIE
Place	Glasgow, United Kingdom
NPARC number	12338957
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Record identifier	b269c19d-02d2-4765-9ab3-5fe4d9c50b07
Record created	2009-09-11
Record modified	2020-04-16