Design of a large-volume microwave plasma facility for metal passivation: a final report
Design of a large-volume microwave plasma facility for metal passivation: a final report
| Author | Search for: ; Search for: |
|---|---|
| Format | Text, Technical Report |
| Physical description | 1 v. |
| Publication date | 1982-08-16 |
| Publisher | National Research Council of Canada. Industrial Materials Research Institute |
| Series | |
| Note | The publication is stored in the NRC Archives. On the title page: "prepared for National Research Council Canada. Industrial Materials Research Institute" |
| Language | English |
| Peer reviewed | No |
| NRC number | NRCC 0020612 |
| NPARC number | 23003896 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | bbfeab17-85a6-4b88-b669-d2ee75727b1f |
| Record created | 2018-08-22 |
| Record modified | 2023-01-17 |
- Date modified: