| DOI | Resolve DOI: https://doi.org/10.1109/PN58661.2023.10222993 |
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| Author | Search for: Naraine, Cameron M.; Search for: Hashemi, Batoul; Search for: Hoffman, Nicholas A.; Search for: Price, Jeffrey S.; Search for: Knights, Andrew P.; Search for: Emslie, David J. H.; Search for: Schmid, Jens H.1; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Bradley, Jonathan D. B. |
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| Affiliation | - National Research Council of Canada. Quantum and Nanotechnologies
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| Format | Text, Article |
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| Conference | 2023 Photonics North (PN), June 12-15, 2023, Montreal, QC, Canada |
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| Subject | subwavelength gratings; metamaterials; atomic layer deposition; aluminum oxide; silicon nitride; integrated photonics; claddings; atomic layer deposition; rapid prototyping; foundries; gratings |
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| Abstract | We report on subwavelength grating metamaterial waveguides fabricated on a rapid prototyping silicon nitride foundry platform coated in aluminum oxide grown using a post-process atomic layer deposition system. We discuss the design of the metamaterial waveguides and report experimental results for the hybrid waveguide devices. |
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| Publication date | 2023-06-12 |
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| Publisher | IEEE |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | bd4d7875-c4fc-4f2b-a546-df64e88e5c7d |
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| Record created | 2024-11-05 |
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| Record modified | 2024-11-05 |
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