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The use of etching during the precise manufacture of optical multilayer coatings

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Vacuum Technology & Coating 4, no. 3 (2003): 36–41.
NPARC number12744197
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Record identifierbf262d8e-0c1c-4cf9-8eb8-a3e361256d08
Record created2009-10-27
Record modified2020-04-02
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