| DOI | Resolve DOI: https://doi.org/10.1017/S1431927615007710 |
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| Author | Search for: Malac, Marek1; Search for: Beleggia, Marco; Search for: Rowan, Teddy1; Search for: Egerton, Ray1; Search for: Kawasaki, Masahiro; Search for: Okura, Yoshio; Search for: Mcleod, Robert A. |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Format | Text, Article |
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| Conference | Microscopy & Microanalysis 2015, Aug 2-6, 2015, Portland, Oregon, United States |
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| Abstract | A thin film irradiated by high-energy primary electrons (PE) emits secondary electrons (SE). The SE are either emitted from the sample (SEα) or travel within the sample (SEβ) [1]. Figure 1 illustrates the various types of SEs. The PEs, SEα and the SEβ affect, by modifying the film properties, the rate at which the irradiated sample area reaches a steady state. Both PE and SEβ can cause radiation damage and electron beam induced conductivity (EBIC). The discussed phenomena are relevant to sample charging, damage and to various implementations of hole-free phase plate (HFPP). The beam-induced modifications can result in a spatially-dependent surface potential σ(r), generating an electric field Eᵥ(r,z) that extends in the vacuum surrounding the sample. |
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| Publication date | 2015-08-01 |
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| Publisher | Cambridge University Press |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | c20abac3-843c-4d83-b7c7-be36559cede9 |
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| Record created | 2020-01-21 |
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| Record modified | 2024-05-15 |
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