Language selection

Government of Canada / Gouvernement du Canada

Search

Design of a large measurement-volume metrological atomic force microscope (AFM)

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0957-0233/20/8/084003
AuthorSearch for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for National Measurement Standards
FormatText, Article
Subjectatomic force microscopy; nanotechnology; metrology
Abstract
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. The translation of the sample is accomplished with multiple stages which allow for separate 'coarse' and 'fine' motion. Interferometers and autocollimators are used to measure the position and orientation of the sample. The instrument does not attempt to control position via feedback from the interferometers, thereby allowing use of readily available commercial translation stages and controllers.
Publication date
In
  • Measurement Science and Technology 20, no. 8 (30 June 2009): 084003-1–084003-5.
LanguageEnglish
Peer reviewedNo
NPARC number21268136
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifierc9369cda-e48e-4e10-88e4-6f594506d6ed
Record created2013-05-08
Record modified2020-04-16
Date modified: