Structure characterization of AlN buffer layers grown on (0001) sapphire by magnetron sputter epitaxy

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0022-0248(02)01602-0
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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Peer reviewedYes
NPARC number12338420
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Record identifierd4fe075b-e547-4b56-bb5f-0823b8451829
Record created2009-09-10
Record modified2020-04-06
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