Language selection

Government of Canada / Gouvernement du Canada

Search

Evaluation of the electrical properties of nickel silicide films for ULSI applications

From National Research Council Canada

AuthorSearch for: 1; Search for: 1; Search for: ; Search for:
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceThirteenth International VLSI Multilevel Interconnection Conference, 22-23 February 1996, Santa Clara, CA, USA
Publication date
In
  • 1996 proceedings : Thirteenth International VLSI Multilevel Interconnection Conference (VMIC) (June 1996): 560–565.
NPARC number12327202
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifierd536e210-7ee2-4a6b-9383-eda126f10932
Record created2009-09-10
Record modified2020-03-20
Date modified: