Black layer coatings for the photolithographic manufacture of diffraction gratings

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1364/AO.41.003306
AuthorSearch for: 1; Search for: 1; Search for: 1; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Abstract
Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number21268065
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifierd8ffe21c-eeb2-4e16-b31f-c0d93468aeae
Record created2013-04-05
Record modified2020-03-30
Date modified: