Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators
Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators
| Format | Text, Article |
|---|---|
| Publication date | 2007 |
| In | |
| Peer reviewed | Yes |
| NRC number | 327 |
| NPARC number | 8926073 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | de4b241d-1c47-4b74-bb11-b7a8afbe0b0e |
| Record created | 2009-04-23 |
| Record modified | 2020-05-10 |
- Date modified: