| DOI | Resolve DOI: https://doi.org/10.1109/IPC47351.2020.9252402 |
|---|
| Author | Search for: Godfrey, Alan T. K.1; Search for: Kallepalli, L. N. Deepak1; Search for: Zhang, Chunmei1; Search for: Corkum, P. B.1 |
|---|
| Affiliation | - National Research Council of Canada. Security and Disruptive Technologies
|
|---|
| Format | Text, Article |
|---|
| Conference | 2020 IEEE Photonics Conference (IPC), 29 September - 1 October, 2020, Vancouver, BC, Canada |
|---|
| Subject | femtosecond lasers; laser fabrication; microfabrication; nanofabrication; ultrafast optics |
|---|
| Abstract | We fabricate micro- and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film. |
|---|
| Publication date | 2020-11-16 |
|---|
| Publisher | IEEE |
|---|
| In | |
|---|
| Language | English |
|---|
| Peer reviewed | Yes |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | debb6c5a-2bf0-4c7b-89c9-b3d78f426c82 |
|---|
| Record created | 2021-05-11 |
|---|
| Record modified | 2021-07-13 |
|---|
