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A new method to fabricate 3D electron tomography sample using FIB technique

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1017/S1431927611004326
AuthorSearch for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: 1
Affiliation
  1. National Research Council of Canada
FormatText, Article
ConferenceMicroscopy & Microanalysis 2011, August 7-11, 2011, Nashville, Tennessee, United States
Abstract
Electron tomography (ET) in a TEM has been widely used to characterize materials at sub-10 nm spatial resolution. The first example of tomographic imaging in an electron microscope was reported four decades ago. However, due to the fast development of processing capacity of modern computers it is only in the past few years that ET in (scanning) transmission electron microscopy ((S)TEM) has become a more viable option for investigating the morphologies, spatial distribution and chemical compositions of nanostructures.
Publication date
PublisherCambridge University Press
In
  • Microscopy and Microanalysis 17, no. S2 (11 August 2011): 690–691.
LanguageEnglish
Peer reviewedYes
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Record identifierdfc31e91-841b-451f-abe1-fb7aa5829540
Record created2020-03-10
Record modified2024-05-15
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