Tomographic measurement of buried interface roughness

From National Research Council Canada

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DOIResolve DOI: https://doi.org/10.1116/1.4926975
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Affiliation
  1. National Research Council of Canada. Security and Disruptive Technologies
FormatText, Article
Subjectinelastic scattering; focused ion beam; surface optics; electron beams; tomography; electronic noise; semiconductor devices; solid solid interfaces; electron scattering; image processing
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LanguageEnglish
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Record created2020-05-29
Record modified2020-05-29
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