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X-ray photoelectron spectroscopic study of KrF excimer laser nitrided InP surface

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1412837
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Affiliation
  1. National Research Council Canada. NRC Institute for Chemical Process and Environmental Technology
FormatText, Article
Publication date
In
  • Journal of Applied Physics 90, no. 12 (2000): 5851–5855.
LanguageEnglish
Peer reviewedYes
NPARC number12744166
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Record identifiere5575492-2c6f-4587-966f-cc8d8dabb393
Record created2009-10-27
Record modified2023-04-17
Date modified: