L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography

From National Research Council Canada

DOI	Resolve DOI: https://doi.org/10.1364/OL.42.003439
Author	Search for: Benedikovic, Daniel; Search for: Alonso-Ramos, Carlos; Search for: Pérez-Galacho, Diego; Search for: Guerber, Sylvain; Search for: Vakarin, Vladyslav; Search for: Marcaud, Guillaume; Search for: Roux, Xavier Le; Search for: Cassan, Eric; Search for: Marris-Morini, Delphine; Search for: Cheben, Pavel¹ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Boeuf, Frédéric; Search for: Baudot, Charles; Search for: Vivien, Laurent
Name affiliation	National Research Council of Canada. Advanced Electronics and Photonics
Format	Text, Article
Journal title	Optics Letters
ISSN	0146-9592 1539-4794
Volume	42
Issue	17
Pages	3439–3442
Abstract	Grating couplers enable position-friendly interfacing of silicon chips by optical fibers. The conventional coupler designs call upon comparatively complex architectures to afford efficient light coupling to sub-micron silicon-on-insulator (SOI) waveguides. Conversely, the blazing effect in double-etched gratings provides high coupling efficiency with reduced fabrication intricacy. In this Letter, we demonstrate for the first time, to the best of our knowledge, the realization of an ultra-directional L-shaped grating coupler, seamlessly fabricated by using 193 nm deep-ultraviolet (deep-UV) lithography. We also include a subwavelength index engineered waveguide-to-grating transition that provides an eight-fold reduction of the grating reflectivity, down to 1% (−20 dB). A measured coupling efficiency of −2.7 dB (54%) is achieved, with a bandwidth of 62 nm. These results open promising prospects for the implementation of efficient, robust, and cost-effective coupling interfaces for sub-micrometric SOI waveguides, as desired for large-volume applications in silicon photonics.
Publication date	2017-08-28
Publisher	Optical Society of America
Language	English
Peer reviewed	Yes
NPARC number	23002295
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Record identifier	ee20ca3c-30cd-4dbd-886e-47bbd52e869b
Record created	2017-10-11
Record modified	2020-03-16

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Date modified:: 2021-06-24