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Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.1326940
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FormatText, Article
Subjectrandom processes; scanning electron microscopy; transmission electron microscopy; vapour deposition
Abstract
We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices.
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  • Journal of Vacuum Science & Technology A : Vacuum, Surfaces, and Films 19, no. 1: 158–166.
LanguageEnglish
NRC publication
This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12338246
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Record identifierf2274dbd-a120-4dc0-879f-82d0b1ede1f8
Record created2009-09-10
Record modified2020-03-26
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