| DOI | Resolve DOI: https://doi.org/10.1017/S1431927618011601 |
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| Author | Search for: Hayashida, Misa1; Search for: Morteza Najarian, Amin1; Search for: Mccreery, Richard1; Search for: Malac, Marek1 |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Format | Text, Article |
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| Conference | Microscopy & Microanalysis 2018, August 5-9, 2018, Baltimore, Maryland, United States |
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| Abstract | To visualize the internal components of electronic devices in three dimensions (3D), it is necessary to use an imaging method that provides high contrast difference between the materials the device is composed of. Often the contrast of bright field transmission electron microscope (BFTEM) or scanning transmission electron microscope (STEM) is too low resulting in high irradiation dose to obtain adequate signal to noise ratio (SNR) for reliable 3D reconstruction. The low contrast is of concern especially when the sample of interest is composed of light elements [1]. The high irradiation dose implies extensive radiation damage [2] and thus unreliable 3D volume reconstruction. High angle annular dark field (HAADF) STEM is not applicable as it relies on large difference of atomic number of the components. Core loss electron energy loss spectroscopy (EELS) typically requires high irradiation dose due to small core loss cross sections while low loss EELS signal delocalization is often of the same order as the lateral dimensions of the examined layers. |
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| Publication date | 2018-08-01 |
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| Publisher | Cambridge University Press |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | f70f94b6-6ba0-4524-99db-817d3ccb2d22 |
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| Record created | 2020-01-21 |
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| Record modified | 2024-05-15 |
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