Quantum-well intermixing in Si1-xGex/Si strained-layer heterostructures using ion implantation

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.117106
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
SubjectHeterostructures; Silicon; Germanium Silicides; Ion Implantation; Quantum Wells; Photoluminescence; Blue Shift; Strains; Ge and Si; ow-dimensional; mesoscopic; nanoscale and other related systems: structure and nonelectronic properties; Elemental semiconductors
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LanguageEnglish
Peer reviewedYes
NPARC number12328451
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Record identifierf798477c-9b2d-4e09-a342-ba40314e6b4b
Record created2009-09-10
Record modified2020-03-20
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