| DOI | Trouver le DOI : https://doi.org/10.1002/jemt.22044 |
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| Auteur | Rechercher : Wang, Xiongyao1; Rechercher : Lockwood, Ross1; Rechercher : Vick, Doug1; Rechercher : Li, Peng1; Rechercher : Meldrum, Al1; Rechercher : Malac, Marek1 |
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| Affiliation | - Conseil national de recherches du Canada. Technologies de sécurité et de rupture
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| Format | Texte, Article |
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| Sujet | electron tomography; sample preparation; FIB; high tilt range; thin film deposition |
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| Résumé | Here we report a new sample preparation method for three-dimensional electron tomography. The method uses the standard film deposition and focused ion beam (FIB) methods to significantly reduce the problems arising from the projected sample thickness at high tilt angles. The method can be used to prepare tomography samples that can be imaged up to a ±75° tilt range which is sufficient for many practical applications. The method can minimize the problem of Ga+ contamination, as compared to the case of FIB preparation of rod-shaped samples, and provides extended thin regions for standard 2D projection analyses. |
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| Date de publication | 2012-03-27 |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 21268162 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 0a699e58-b9b8-4753-9912-793888be0425 |
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| Enregistrement créé | 2013-05-14 |
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| Enregistrement modifié | 2020-04-21 |
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