Periodic magnetic microstructures by glancing angle deposition

Par Conseil national de recherches du Canada

DOI	Trouver le DOI : https://doi.org/10.1116/1.582481
Auteur	Rechercher : Dick, B.; Rechercher : Brett, M. J.; Rechercher : Smy, T. J.; Rechercher : Freeman, M. R.; Rechercher : Malac, M.; Rechercher : Egerton, R. F.
Format	Texte, Article
Conférence	46th National Symposium of the American Vacuum Society
Sujet	arrays; cobalt; electron beam deposition; electron beam lithography; magnetic thin films; nucleation; semiconductor-metal boundaries; transmission electron microscopy; X-ray diffraction
Résumé	An advanced deposition technique known as glancing angle deposition (GLAD) [K. Robbie, J. C. Sit, and M. J. Brett, J. Vac. Sci. Technol. B 16, 1115 (1998); K. Robbie and M. J. Brett, U.S. Patent No. 5,866,204 (filed 1999)] has been used to fabricate periodic arrays of magnetic pillars and randomly seeded magnetic helices, posts, and chevrons. Because of the nature of initial film nucleation, the GLAD process normally distributes posts randomly on the substrate surface. We can grow periodic arrays of GLAD microstructures by suppressing the randomness inherent within the initial nucleation stage of film growth. Shadowing sites were fabricated by pre-patterning a thin titanium layer on silicon substrates into a square array using electron beam lithography. These sites shadow regions of the substrate from incident flux during film deposition and act as preferred nucleation sites for film growth. Using this process, we have fabricated periodic arrays of cobalt posts with a regular elemental period of 600 nm and post diameters and heights of 300 and 400 nm, respectively. Randomly seeded posts, helices, and chevrons were also fabricated. The mean separation for the randomly seeded posts was 350 nm with individual post diameters of 100�150 nm, while the separations for the helices and chevrons were less than 100 nm. X-ray diffraction, transmission electron microscopy, and a dc superconducting quantum interference device magnetometer were used to analyze the magnetic and crystal properties of both the periodic and randomly seeded arrays. A newly developed three-dimensional ballistic deposition simulator was used to simulate the growth of the periodic post arrays in order to better understand the growth mechanisms.
Date de publication	2000
Maison d’édition	AVS
Dans	Journal of Vacuum Science & Technology A 18, nº 4 (31 décembre 2008) : 1838–1844.
Langue	anglais
Publication du CNRC	Cette publication n’est pas du CNRC Ce sont des publications qui ont été rédigées par un auteur du CNRC, mais avant que celui-ci soit employé du CNRC.
Numéro NPARC	12338938
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	0f6dd67a-8195-4375-84b4-824dfa3df441
Enregistrement créé	2009-09-11
Enregistrement modifié	2020-03-26

Date de modification :: 2024-07-19