| Téléchargement | - Voir la version finale : Subwavelength grating metamaterial waveguides and ring resonators on a silicon nitride platform (PDF, 1.6 Mio)
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| DOI | Trouver le DOI : https://doi.org/10.1002/lpor.202200216 |
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| Auteur | Rechercher : Naraine, Cameron M.Identifiant ORCID : https://orcid.org/0000-0001-5577-5290; Rechercher : Westwood‐Bachman, Jocelyn N.; Rechercher : Horvath, Cameron; Rechercher : Aktary, Mirwais; Rechercher : Knights, Andrew P.; Rechercher : Schmid, Jens H.1; Rechercher : Cheben, Pavel1Identifiant ORCID : https://orcid.org/0000-0003-4232-9130; Rechercher : Bradley, Jonathan D. B. |
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| Affiliation | - Conseil national de recherches du Canada. Électronique et photonique avancées
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| Bailleur de fonds | Rechercher : Natural Sciences and Engineering Research Council of Canada; Rechercher : Canada Foundation for Innovation; Rechercher : National Research Council Canada |
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| Format | Texte, Article |
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| Résumé | Subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform are proposed and demonstrated. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which have critical dimensions greater than 100 nm, are fabricated using a commercial rapid turn-around silicon nitride prototyping foundry process using electron beam lithography. Experimental characterization of the fabricated device reveals excellent ring resonator internal quality factor (2.11 × 10⁵) and low propagation loss (≈1.5 dB cm⁻¹) in the C-band, a significant improvement of both parameters compared to silicon-based SWG ring resonators. These results demonstrate the promising prospects of SWG metamaterial structures for silicon nitride based photonic integrated circuits. |
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| Date de publication | 2022-12-19 |
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| Maison d’édition | wiley |
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| Licence | |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 354252fd-7b02-4278-943f-4a74d502fa34 |
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| Enregistrement créé | 2023-08-29 |
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| Enregistrement modifié | 2023-08-29 |
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