| Résumé | Here the growth kinetics of vertically aligned carbon nanotube forests depend on the size of the patterned catalyst films from which they grow. Forests are grown using chemical vapor deposition on thin film catalyst islands patterned at the 100 μm scale on silicon wafers. The smaller the pattern, the faster the forest grows and the earlier it stops growing. Furthermore, the shape and structure of the forests, in particular the concavity of their top surface, also depend on the size of the catalyst islands. This result can be understood as a consequence of the high efficiency by which the acetylene source gas is converted into carbon nanotubes (here ∼30%) and a varying local amount of acetylene source gas available for growth. A diffusion model can explain the observed shape and structure of the forests and their growth kinetics by using experimentally measured parameters. This model also gives insight into the density and growth rate of carbon nanotube forests and suggests a mechanism that coordinates growth rates across the sample and, under certain conditions, can limit the fraction of catalyst nanoparticles that produce nanotubes. |
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