Silicon and germanium suspended waveguides for the mid-infrared

Par Conseil national de recherches du Canada

DOI	Trouver le DOI : https://doi.org/10.1109/PHOSST.2018.8456763
Auteur	Rechercher : Osman, A.; Rechercher : Soler-Penades, J.; Rechercher : Sanchez-Postigo, A.; Rechercher : Wu, Y.; Rechercher : Qu, Z.; Rechercher : Wanguemert-Perez, J. G.; Rechercher : Ortega-Monux, A.; Rechercher : Halir, R.; Rechercher : Cheben, P.¹Identifiant ORCID : https://orcid.org/0000-0003-4232-9130; Rechercher : Molina-Fernandez, I.; Rechercher : Nedeljkovic, M.; Rechercher : Mashanovich, G. Z.
Affiliation	Conseil national de recherches du Canada. Électronique et photonique avancées
Format	Texte, Article
Conférence	2018 IEEE Photonics Society Summer Topical Meeting Series (SUM), July 9-11, 2018, Waikoloa, HI, USA
Résumé	Both silicon and germanium are very interesting materials for mid-infrared applications, particularly sensing, due to their low material losses at long wavelengths. Silicon is low loss up to 8 μm, and germanium up to 15 μm. To fully exploit these long wavelength transmission ranges of Si and Ge, and to build Si and Ge long wavelength photonic circuits, cladding materials need to have the same or larger transmission wavelength ranges than Si or Ge. One solution is to remove a lossy substrate and create Si and Ge suspended structures with air cladding. In the case of SOI, buried oxide can be removed by HF, and for the Ge-on-Si platform, Si substrate can be removed by TMAH. In this paper we report on the fabrication and characterization of suspended Ge waveguides at a wavelength of 3.8 μm, and on Si waveguides operating at a wavelength of 7.7 μm, both of which are the longest reported wavelengths for the two platforms
Date de publication	2018-09-06
Maison d’édition	IEEE
Dans	2018 IEEE Photonics Society Summer Topical Meeting Series (SUM) : 181–182.
Langue	anglais
Publications évaluées par des pairs	Oui
Numéro NPARC	23004076
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	662f8f8e-8ca8-4d06-8187-fbce1557f952
Enregistrement créé	2018-09-25
Enregistrement modifié	2020-03-16

Date de modification :: 2024-05-11