| Résumé | The importance of aluminum nitride (AlN) stems from its application in microelectronics as a substrate material. Yttria (Y2O3) is the best additive for AlN sintering, and it has been shown that AlN densifies by a liquid-phase mechanism, where the surface oxide, Al2O3, reacts with the oxide additive, Y2O3, to form a Y-Al-O-N liquid that promotes particle rearrangement and densification. Construction of the phase relations in this multicomponent system is becoming essential for further development of AlN. The ternary phase diagram of AlN-Al2O3-Y2O3 was thermodynamically modeled and verified experimentally using in situ high-temperature neutron diffractometry. The ternary phase diagram of AlN-Al2O3-Y2O3 has been constructed for the first time in this work. |
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