| DOI | Trouver le DOI : https://doi.org/10.1116/1.4821194 |
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| Auteur | Rechercher : Diao, Z.1; Rechercher : Losby, J.E.1; Rechercher : Burgess, J.A.J.1; Rechercher : Sauer, V.T.K.1; Rechercher : Hiebert, W.K.1; Rechercher : Freeman, M.R.1 |
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| Affiliation | - Conseil national de recherches du Canada. Institut national de nanotechnologie
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| Format | Texte, Article |
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| Sujet | Electron beam patterning; Fabrication process; Hydrofluoric acid etching; Nanomechanical device; Nanomechanical resonators; Silicon-on-insulator substrates; Surface micromachined structure; Wide temperature ranges; Hydrofluoric acid; Magnetic moments; Magnetostatics; Nanostructures; Resonators; Thermomechanical treatment; Fabrication |
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| Résumé | The authors report a highly flexible process for nanostructure lithography to incorporate specific functions in micro- and nanomechanical devices. The unique step involves electron beam patterning on top of released, resist-supported, surface micromachined structures, hence avoiding hydrofluoric acid etching of sensitive materials during the device release. The authors demonstrate the process by creating large arrays of nanomechanical torque magnetometers on silicon-on-insulator substrates. The fabricated devices show a thermomechanical noise-limited magnetic moment sensitivity in the range of 5 × 106 μB at room temperature and can be utilized to study both magnetostatics and dynamics in nanomagnets across a wide temperature range. The fabrication process can be generalized for the deposition and patterning of a wide range of materials on micro-/nanomechanical resonators. © 2013 Crown. |
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| Date de publication | 2013 |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 21269841 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 98c5f1ee-742d-4bdc-9274-bb6dbc13c901 |
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| Enregistrement créé | 2013-12-13 |
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| Enregistrement modifié | 2020-04-22 |
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