| DOI | Trouver le DOI : https://doi.org/10.1109/ULTSYM.1988.49385 |
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| Auteur | Rechercher : Sreenivas, K.; Rechercher : Sayer, M.; Rechercher : Jen, C. K.1; Rechercher : Yamanaka, K.1 |
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| Affiliation | - Conseil national de recherches du Canada
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| Format | Texte, Article |
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| Conférence | 1988 IEEE Ultrasonics Symposium, October 2-5, 1988, Chicago, Illinois, United States |
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| Résumé | Piezoelectricity of lead zirconate titanate (PZT) thin films has been successfully obtained. The films were fabricated by reactive sputtering of a composite metal target. They were found to possess good ferroelectric and dielectric properties. Two poling configurations were used. Bulk and surface acoustic wave measurements using poled PZT films are presented. Scanning acoustic microscope images and V(z) curves obtained at 775 MHz were used to characterize these thin films. |
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| Date de publication | 1988 |
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| Maison d’édition | IEEE |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | c65a42ca-0f76-4261-822e-86d4564be013 |
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| Enregistrement créé | 2024-03-18 |
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| Enregistrement modifié | 2024-03-18 |
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