| Résumé | Non-conventional micro fabrication technologies, such as laser micro machining, micro EDM, etc., are [the] most suitable and cost effective choice for prototyping of micro parts/systems, and also in some cases, for batch production. This is especially true for complex microdevices which require functional and/or composite materials other than silicon. In this presentation, NRC-IMTI's capabilities in laser micro fabrication of micro mechanisms, eg., actuators and grippers, integrated with force/displacement capacitive sensors, and in micro fabrication of 2D/3D micro moulds and dies for microfluidics applications are discussed. Systematic representation of the high-precision laser material removal process uncovers main disturbances that affect fabrication with nano/micro-scale accuracy, precision, and geometric quality. Using case studies of micro parts and mechanisms fabricated by the laser micromachining technology, several machining challenges related to non-uniformity and dynamic errors of motions, corner accuracy, asynchronization of motions and laser on/off events in space and time with respect to the part geometry, are evaluated. Also, effect and optimization of several process parameters, such as laser power, focal distance, number of machining passes, etc., are evaluated with respect to the machined surface topology. Results of these studies allowed achieving accuracy and precision of fabricated micro parts and mechanisms within +/- one micrometer or less and surface roughness of 70 nm. |
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