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Consistent probe spacing in multi-probe STM experiments

From National Research Council Canada

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DOIResolve DOI: https://doi.org/10.1063/5.0021739
AuthorSearch for: ORCID identifier: https://orcid.org/0000-0003-4906-2571; Search for: 1; Search for: 1ORCID identifier: https://orcid.org/0000-0002-7488-3032; Search for: ; Search for: 1ORCID identifier: https://orcid.org/0000-0002-5103-2980
Affiliation
  1. National Research Council of Canada. Nanotechnology
FormatText, Article
Subjectfocused ion beam; surface and interface chemistry; scanning tunneling microscopy; electric measurements; semiconductor device fabrication; field ion microscopy
Abstract
Multi-probe scanning tunneling microscopy can play a role in various electrical measurements and characterization of nanoscale objects. The consistent close placement of multiple probes relies on very sharp apexes with no other interfering materials along the shank of the tip. Electrochemically etched tips can prepare very sharp apex tips; however, other asperities on the shank can cause interference and limit the close positioning of multiple tips to beyond the measured radii. Gallium focused ion beam (FIB) milling is used to remove any interfering material and allow closely spaced tips with a consistent yield. The tip apex radius is evaluated with field ion microscopy, and the probe spacing is evaluated with STM on hydrogen terminated silicon surfaces. FIB prepared tips can consistently achieve the measured probe to probe spacing distances of 25 nm–50 nm.
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PublisherAIP
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  • AIP Advances 10, no. 10, 105213: 1–5.
LanguageEnglish
Peer reviewedYes
NRC numberNRC-NANO-67
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Record identifier040a986c-e28a-4b4e-965f-3adc8a8c6ff9
Record created2021-02-01
Record modified2021-02-02
Date modified: