| Téléchargement | - Voir la version finale : Consistent probe spacing in multi-probe STM experiments (PDF, 2.8 Mio)
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| DOI | Trouver le DOI : https://doi.org/10.1063/5.0021739 |
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| Auteur | Rechercher : Onoda, JoIdentifiant ORCID : https://orcid.org/0000-0003-4906-2571; Rechercher : Vick, Doug1; Rechercher : Salomons, Mark1Identifiant ORCID : https://orcid.org/0000-0002-7488-3032; Rechercher : Wolkow, Robert; Rechercher : Pitters, Jason1Identifiant ORCID : https://orcid.org/0000-0002-5103-2980 |
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| Affiliation | - Conseil national de recherches du Canada. Nanotechnologie
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| Format | Texte, Article |
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| Sujet | focused ion beam; surface and interface chemistry; scanning tunneling microscopy; electric measurements; semiconductor device fabrication; field ion microscopy |
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| Résumé | Multi-probe scanning tunneling microscopy can play a role in various electrical measurements and characterization of nanoscale objects. The consistent close placement of multiple probes relies on very sharp apexes with no other interfering materials along the shank of the tip. Electrochemically etched tips can prepare very sharp apex tips; however, other asperities on the shank can cause interference and limit the close positioning of multiple tips to beyond the measured radii. Gallium focused ion beam (FIB) milling is used to remove any interfering material and allow closely spaced tips with a consistent yield. The tip apex radius is evaluated with field ion microscopy, and the probe spacing is evaluated with STM on hydrogen terminated silicon surfaces. FIB prepared tips can consistently achieve the measured probe to probe spacing distances of 25 nm–50 nm. |
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| Date de publication | 2020-10-07 |
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| Maison d’édition | AIP |
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| Licence | |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro du CNRC | NRC-NANO-67 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 040a986c-e28a-4b4e-965f-3adc8a8c6ff9 |
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| Enregistrement créé | 2021-02-01 |
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| Enregistrement modifié | 2021-02-02 |
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