| Download | - View accepted manuscript: Composition Modulation in High-k Hafnium Silicate Films (PDF, 907 KiB)
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| DOI | Resolve DOI: https://doi.org/10.1017/S1431927610059143 |
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| Author | Search for: Wu, X.1; Search for: Liu, J.; Search for: Lennard, W. N.; Search for: Landheer, D.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Publication date | 2010-08-05 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 17161796 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 07b8207b-8006-49de-aa5b-01a543146155 |
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| Record created | 2011-03-26 |
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| Record modified | 2020-04-17 |
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