| Download | - View accepted manuscript: Robust phase-stepping interferometry for traceable length measurements in a Hilger-Watts gauge-block interferometer (PDF, 917 KiB)
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| DOI | Resolve DOI: https://doi.org/10.1088/1681-7575/ab63af |
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| Author | Search for: Leroux, Ian D.1; Search for: Eves, Brian J.1 |
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| Affiliation | - National Research Council of Canada. Metrology Research Centre
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| Format | Text, Article |
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| Physical description | 8 p. |
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| Abstract | We demonstrate a simple adaptation of the venerable Hilger-Watts gauge-block interferometer capable of performing automated, traceable calibrations of gauge block length by phase-stepping interferometry (PSI). We discuss the selection of robust PSI filtering algorithms to counteract in software the flaws of the hardware implementation, including markedly nonsinusoidal fringes and inhomogeneous phase step size. We find that the length measurement errors attributable to the phase measurement can be reduced to 0.6 nm, even with a simple retrofit to an instrument not originally designed for PSI. |
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| Publication date | 2020-03-19 |
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| Publisher | IOP |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 12306cb6-5978-4556-afd3-0c99bfcc4b39 |
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| Record created | 2020-02-26 |
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| Record modified | 2021-10-14 |
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