Reactively sputtered silicon-oxynitride films and filters
Reactively sputtered silicon-oxynitride films and filters
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Affiliation |
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Format | Text, Article |
Conference | 49th Annual Technical Conference, Society of Vacuum Coaters, 22-27 April 2006, Washington, D.C., USA |
Publication date | 2006 |
In | |
Language | English |
NPARC number | 12346737 |
Export citation | Export as RIS |
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Record identifier | 142e7306-2231-4593-ad6d-8d7c15b8ab07 |
Record created | 2009-09-17 |
Record modified | 2020-04-22 |
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