Dry etching of copper phthalocyanine thin films: Effects on morphology and surface stoichiometry

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.3390/molecules170910119
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  1. National Research Council of Canada. Security and Disruptive Technologies
FormatText, Article
Subjectcarbon; copper; indole derivative; nitrogen; organometallic compound; oxygen; phthalocyanine copper; chemistry; gas laser; surface property; X ray photoelectron spectroscopy; Carbon; Copper; Indoles; Lasers, Gas; Nitrogen; Organometallic Compounds; Oxygen; Photoelectron Spectroscopy; Surface Properties
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LanguageEnglish
Peer reviewedYes
NPARC number21270236
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Record identifier17073649-7a2b-4263-a47f-5fd633a21084
Record created2014-01-15
Record modified2020-04-21
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