Electrical Characterization of metal-oxide-semiconductor capacitors with anodic and plasma-nitrided oxides

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1116/1.582250
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: 1; Search for: 1; Search for: ; Search for: ; Search for:
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
NPARC number12744027
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier1a15a485-736b-4e96-84c8-7c8700b7cd1e
Record created2009-10-27
Record modified2020-03-26
Date modified: