| Download | - View final version: Vertically tapered waveguide spot size converters fabricated via a linewidth controlled grey tone lithography for InP-based photonic integrated circuits (PDF, 2.9 MiB)
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| DOI | Resolve DOI: https://doi.org/10.1364/OE.397489 |
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| Author | Search for: Salehzadeh, O.1; Search for: Vachon, M.1; Search for: Sabourin, N.1; Search for: Janz, S.1; Search for: SpringThorpe, A. J.1 |
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| Affiliation | - National Research Council of Canada. Advanced Electronics and Photonics
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| Format | Text, Article |
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| Abstract | We report a novel and simple fabrication process to realize vertically tapered spot size converters (SSC) on InP photonic integrated circuits. The vertical tapering was achieved via a linewidth controlled local optical dose variation, leading to a grey tone photoresist profile. The fabricated SSCs are compact, polarization insensitive and demonstrate a very high mode conversion efficiency of 95%. Integrated SSCs improved the overall loss by 5 dB giving a coupling loss as low as 1.3 dB/facet, for a lensed fibre with a mode field diameter of 3.0 µm. A good agreement was found between the fibre-to-fibre optical loss measurements and those predicted from simulations. |
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| Publication date | 2020-07-23 |
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| Publisher | OSA |
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| Copyright statement | |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 1e09bc67-a57f-47ba-930c-90c7c4d8cb3a |
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| Record created | 2022-07-20 |
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| Record modified | 2022-07-20 |
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