Gadolinium silicate gate dielectric films with sub-1.5 nm equivalent oxide thickness

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1356725
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Institute for National Measurement Standards
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Publication date
In
LanguageEnglish
Peer reviewedYes
NPARC number12744432
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Record identifier23cf2419-999e-4b8e-b9ae-1945a6df019b
Record created2009-10-27
Record modified2023-05-10
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