III-V access waveguides using atomic layer deposition

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2004310
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Affiliation
  1. National Research Council of Canada
FormatText, Article
ConferenceAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 5 February 2013 through 6 February 2013, San Francisco, CA
SubjectCompound semiconductors; Critical parts; Optically Active; Photonic circuitry; Photonic crystal membranes; Quantum photonics; Selective area epitaxy; Silicon-on-insulators; Atomic layer deposition; Deposition; Quantum chemistry; Refractive index; Technology; Photonics
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LanguageEnglish
Peer reviewedYes
NPARC number21270618
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