Crystallinity, order, the thin-film silicon continuum, and the spectral dependence of the refractive index in thin silicon films grown through ultra-high-vacuum evaporation for a range of growth temperatures

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/j.jnoncrysol.2021.120657
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Affiliation
  1. National Research Council of Canada. Metrology Research Centre
  2. National Research Council of Canada. Advanced Electronics and Photonics
FunderSearch for: Mitacs; Search for: Natural Sciences and Engineering Research Council of Canada
FormatText, Article
Subjectcrystallinity; order; thin-film silicon continuum; ultra-high-vacuum evaporation; growth temperature
Abstract
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PublisherElsevier
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LanguageEnglish
Peer reviewedYes
IdentifierS0022309321000168
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Record identifier2bdfbbe9-fd4f-4cf6-893c-ab85c6524202
Record created2023-01-09
Record modified2023-01-09
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