The effect of microstructure on the interrelationship of electrical, optical and opto-electronic properties in amorphous SixHy alloy films prepared by planar R.F. Magnetron Sputtering
The effect of microstructure on the interrelationship of electrical, optical and opto-electronic properties in amorphous SixHy alloy films prepared by planar R.F. Magnetron Sputtering
DOI | Resolve DOI: https://doi.org/10.1016/0022-3093(85)90787-2 |
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Author | Search for: ; Search for: ; Search for: |
Format | Text, Article |
Publication date | 1985 |
In | |
Language | English |
NRC number | NRCC 24702 NRC-INMS-3496 |
NPARC number | 8897489 |
Export citation | Export as RIS |
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Record identifier | 2cb74e31-9a36-48e5-832a-eacbc4dd6479 |
Record created | 2009-04-22 |
Record modified | 2020-03-17 |
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