| DOI | Resolve DOI: https://doi.org/10.1109/INERTIAL53425.2022.9787524 |
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| Author | Search for: Hodges, Timothy1; Search for: Wu, Lixue1; Search for: Mu, Gengyang2; Search for: Snell, Nikaya2; Search for: Bouchard, Alexandre2; Search for: Stephan, Michel2; Search for: Huang, Huan2; Search for: Koukoulas, Triantafillos1; Search for: Green, Richard1; Search for: St-Gelais, Raphael2 |
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| Affiliation | - National Research Council Canada. Metrology Research Centre
- University of Ottawa. Department of Mechanical Engineering
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| Format | Text, Article |
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| Conference | 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), May 8-11, 2022, Avignon, France |
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| Abstract | We report on the experimental characterization of a mass-loaded silicon nitride membrane-based resonator, which we investigate towards the development of accelerometers for small amplitude acceleration sensing at low frequencies. We experimentally demonstrate a ~1.1 ×10⁻⁶ kg proof mass system achieving a 17,950 mechanical quality factor for a 526 Hz natural resonance frequency, which compares favorably to other optically interrogated on-chip accelerometers. The inferred acceleration noise floor of the device is currently limited by the displacement noise of the optical fiber displacement readout, yielding a noise amplitude spectral density of 1μg/√Hz at 10 Hz. |
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| Publication date | 2022-05-08 |
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| Publisher | IEEE |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 327cca35-d274-4923-962f-787dfda64a7c |
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| Record created | 2023-07-07 |
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| Record modified | 2023-07-07 |
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