| Download | - View accepted manuscript: Fabrication and performance of a photonic-microfluidic integrated device (PDF, 934 KiB)
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| DOI | Resolve DOI: https://doi.org/10.3390/mi3010062 |
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| Author | Search for: Watts, Benjamin R.; Search for: Kowpak, Thomas; Search for: Zhang, Zhiyi1; Search for: Xu, Chang-Qing; Search for: Zhu, Shiping; Search for: Cao, Xudong; Search for: Lin, Min |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Subject | SU-8; PDMS; microfludics; optical waveguide; integration; devices |
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| Abstract | Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection. |
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| Publication date | 2012-02-15 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 19542538 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 32a693ad-5082-4b37-a68b-06dc4d535456 |
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| Record created | 2012-02-29 |
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| Record modified | 2020-04-21 |
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